UST co.,Ltd. - Company Profile

UST co.,Ltd. - Company Profile

TEL Cleanr Track ACT8,12 & Mark 7,8
CMP EBARA EPO 222
Wafer Pre-Alginer

Manual Spinner (Coating, Developing, Stripping, ETC)

Application
- Chip Processing
- PR Coating / Developing / Stripping


Wafer
- FPD / GaAs / GaNi / Glass / OLED / Etc.

Specification - Substrate Manual Loading
- Substrate size :up to 4”
- Spin Chuck :User Requirements
- Pump :Oil-less Vacuum Pump
- Spin Motor :DC or AC Servo Motor
- Operation :Manual operation switch (Tachometer,Timer), Micom or PLC
- Memory of 20ea recipe
- Low price
- Semi Auto Dispense Arm (Optional)

contact : admin@semi-ust.com sales@semi-ust.com

EBARA EPO222 Modification, Upgrade, Overhaul and Conversion

 

EBARA EPO2226,2228 Modification, Upgrade and Overhaul

- EPO2226/EPO2228
- Trouble Shooting and Labor Service
- Free conversion between 6inch with 8inch
- I-Head Repair and Change
- Provide 2nd Source Parts
- Rotary Joint manufacture and modification
- I-Head manufacture and modification
- Provide all of Consumable Parts

 

contact : admin@semi-ust.com sales@semi-ust.com

 

TEL Clean Track ACT8, 12 & Mark 7,8 Modification, Refubishment, Overhaul and upgrade

 TEL ACT-8,12 Machine’s Inch Conversion (6,8 inch)
- 6inch and 8inch Multi Flow
- Cassette Unit and Robot Modification
- Mapping Sensor Block Modification
- Main Robot Arm Modification
- COAT Unit and Cup Modification
- DEV Unit and Cup Modification
- WDS/Plate Modification

2nd Source Parts and Unitof TEL MARK-II, V,VZ, 7,8and ACT-8,12

- Fast delivery and Low-cost but same condition with OEM Parts
- Cassette Stage Assembly manufacture
- C/A Arm, Main Arm (Ceramic, Vacuum Arm, Aluminum and Anodizing Type) manufacture
- Plate (LHP, HHP, CPL, HCP, ADH, HEL and CP Power Supply) manufacture
- Fan Filter Unit A,B Type (Included HEPA Filter)
- Oven Central Stack manufacture of TEL ACT8, 12
- L/E Tank (45cc, 100cc, 150cc, 200cc, etc) manufacture
- TEL MARK and ACT SMIF Type Unit manufacture of Same condition with OEM
- COAT Nozzle Assembly (EBR, Back Side Rinse and Photo Resist Nozzle Tip) manufacture
- DEV Nozzle Assembly (H, SH, Spray and Stream type) manufacture
- Plasma to TFT LCD modification and Upgrade for TEL MARK by Low -cost





Auto Chemical SupplySystem modification and upgrade

- CSS or Manual Supply or Both supply modification
- Buffer Tank Auto Exchange Type System modification
- Solvent/Develop/HMDS Chemical Supply System manufacture and modification
- Resist Cabinet Photo Resist Auto-Exchange manufacture and modification
- Auto Drain Controller and Tray manufacture and modification 

contact :  admin@semi-ust.com     sales@semi-ust.com